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FKM & FFKM O-Rings for Semiconductor Applications
FKM & FFKM O-Rings for Semiconductor Applications

FKM & FFKM O-Rings for Semiconductor Applications

FKM & FFKM O-Rings for Semiconductor Applications Specification

  • Standard
  • ASTM, AS568, JIS
  • Tolerance
  • 0.05 mm
  • Thickness
  • 1 mm to 5 mm
  • Material
  • FKM (Viton), FFKM (Perfluoroelastomer)
  • Shape
  • Round (O-Ring)
  • Hardness
  • 70 Shore A
  • Temperature
  • -20C to +250C
  • Function
  • Sealing, Chemical Resistance
  • Application
  • Semiconductor manufacturing, Vacuum environments, CMP, Wet and dry process tools
  • Cleanliness
  • Ultra clean, suitable for cleanroom usage
  • Chemical Resistance
  • Excellent against acids, bases, solvents
  • Color
  • Black, White, Custom colors on request
  • Size Range
  • AS568-001 to AS568-425 and custom sizes
  • Packaging
  • Cleanroom double bagged
  • Plasma Resistance
  • Superior resistance to plasma and aggressive media
  • Compression Set
  • Low (15%)
  • Gas Permeability
  • Extremely low
  • Surface Finish
  • Smooth, defect-free
 

FKM & FFKM O-Rings for Semiconductor Applications Trade Information

  • Minimum Order Quantity
  • 10 Meter
  • Supply Ability
  • 5000 Per Month
  • Delivery Time
  • 7 Days
 
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